PURPOSE: To obtain a loader which can load specimen to a defect inspection device automatically without damage and contamination.

CONSTITUTION: The 1st carrier 15 is on an elevator 11 in an initial state, and when the elevator 11 descends and the specimen such as a photomask in the lowermost layer is detected with a photodetector 26, the elevator 11 stops and the specimen is captured on the 1st carrier 15. The 1st carrier 15 is moved along a passage 14 to a specimen handling position 13, where the specimen is delivered to the 3rd carrier 22. The 3rd carrier 22 is turned and the specimen is carried into an adjacent defect inspection device. The specimen which is completed of the inspection is delivered onto the 2nd carrier 17 on a passage 16 by the 3rd carrier 22. Finally the specimen is contained into the cassette 10 on an elevator 12 as the 2nd carrier 17 moves. The specimen is thus inspected withot damage and contamination and the inspected specimen is stored successively and automatically.