Title:
AUTOMATIC MESH FORMING APPARATUS
Document Type and Number:
Japanese Patent JPH04317354
Kind Code:
A
Abstract:
PURPOSE: To provide an automatic mesh generation apparatus which automatically generates orthogonal meshes, for finite difference method use, which are used for a semiconductor-device simulation apparatus.
CONSTITUTION: A P-N junction face at the inside of a semiconductor element is computed from the impurity distribution of the semiconductor element by using a P-N junction part computation device 5; its whole region is divided into small sections. In addition, mesh conditions inside each small section are computed by using a minimum mesh-interval computation device 7, a mesh- number computation device 8 and a mesh-interval-ratio computation device 9. Thereby, orthogonal meshes for finite difference method use are generated automatically.
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Inventors:
UMEDA TAKUYA
Application Number:
JP8410591A
Publication Date:
November 09, 1992
Filing Date:
April 16, 1991
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L21/66; G06F17/50; H01L21/301; (IPC1-7): G06F15/60; H01L21/66
Attorney, Agent or Firm:
Akio Miyai