Title:
AUTOMATIC POLISHING DEVICE
Document Type and Number:
Japanese Patent JP2002346919
Kind Code:
A
Abstract:
To provide an automatic polishing device for polishing a polishing object (sample) without generating a rugged surface, horizontally and economically.
The polishing object is automatically polished by being held between a first rotating plate and a second rotating plate arranged in parallel. The first rotating plate and the second rotating plate are constituted to rotate in opposite directions each other. The first rotating plate is constituted so as to perform a vertical motion and a revolving motion with the polishing object as a center. When the first rotating plate shields light from a polishing amount detecting sensor, rotation of the first rotating plate and the second rotating plate is automatically stopped.
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Inventors:
OSHIMA SHIGEKI
TANAKA MITSURU
TANAKA MITSURU
Application Number:
JP2001152750A
Publication Date:
December 04, 2002
Filing Date:
May 22, 2001
Export Citation:
Assignee:
HITACHI CABLE
International Classes:
B24B37/013; (IPC1-7): B24B37/04
Attorney, Agent or Firm:
Shigeru Kawasumi
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