Title:
Automatic pollution detection of a capacitance diaphragm gauge
Document Type and Number:
Japanese Patent JP6125049
Kind Code:
B2
Abstract:
A system and a method detect contamination of a diaphragm in a capacitance diaphragm gauge wherein a contaminated diaphragm deflects less in the presence of pressure than an uncontaminated diaphragm. The system and method measure a base pressure. A DC voltage is applied between the diaphragm and a fixed electrode to cause the diaphragm to deflect to simulate an effective pressure. The system and method measure a combined pressure caused by the base pressure and the effective pressure. The system and method subtract the base pressure to determine the effective pressure caused by the static diaphragm deflection. If the measured effective pressure is less than an acceptable effective pressure, the system and method determine that the diaphragm is contaminated.
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Inventors:
Ferran David Jay.
Ferran Robert Jay.
Ferran Robert Jay.
Application Number:
JP2015555406A
Publication Date:
May 10, 2017
Filing Date:
January 28, 2014
Export Citation:
Assignee:
FERRAN TECHNOLOGY,INC.
International Classes:
G01L27/00; G01L9/12
Domestic Patent References:
JP2009524823A | ||||
JP2001141592A | ||||
JP510968A |
Foreign References:
US4823603 |
Attorney, Agent or Firm:
Fumio Takino
Hideo Takino
Takao Kawasaki
Toshiaki Tsuda
Masashi Torino
Hideo Takino
Takao Kawasaki
Toshiaki Tsuda
Masashi Torino
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