Title:
AUTOMATON FOR MANIPULATING PARTS
Document Type and Number:
Japanese Patent JPS5350673
Kind Code:
A
Inventors:
BAAJI WAADO MATSUKURUAA
Application Number:
JP12436177A
Publication Date:
May 09, 1978
Filing Date:
October 17, 1977
Export Citation:
Assignee:
TEXAS INSTRUMENTS INC
International Classes:
G05D3/12; B25J9/18; G05B19/408; H01L21/60; H01L21/67; H01L21/68; (IPC1-7): G05D3/00; H01L21/60; H01L21/68