To provide a cold cathode ionization vacuum gage capable of preventing an auxiliary ignition device from being deformed and improving the efficiency in assembly work while achieving stable operation in a high vacuum condition.
The cold cathode ionization vacuum gage 21 includes a vacuum gage body 22, a discharge space 28 partitioned in the inside of the vacuum gage body, a shaft-like electrode 26 installed in the inside of the vacuum gage body, and the auxiliary ignition devices 24A, 24B for inducing discharge in the discharge space. The auxiliary ignition device includes a base part 41 supported in the vacuum gage body, a through hole 42 which is formed in the base part and the shaft-like electrode passes through, and a protrusion 43 protruding toward the shaft-like electrode from an inner peripheral face of the through hole. The protrusion 43 induces discharge between the shaft-like electrode 26 and it and generates plasma stably in a high vacuum condition. In addition, it is possible to prevent deformation of the protrusion 43 when assembling the shaft-like electrode 26 in the vacuum gage body 22, thereby improving the efficiency in the assembly work.
TANAKA RIYOUTA
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Ori Akira
Yasuo Iisaka