Title:
B-A TYPE HOT CATHODE IONIZATION VACUUM GAUGE
Document Type and Number:
Japanese Patent JP2006343304
Kind Code:
A
Abstract:
To stabilize an apparatus in a B-A type hot cathode ionization vacuum gauge, and to release adsorption gas in a short time.
In this B-A type hot cathode ionization vacuum gauge comprising a set of hot cathodes, a helical electrode 7 is placed between the hot cathodes and a bulb wall, the helical electrode 7 bringing about a shielding effect and a heat generating effect in energization.
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Inventors:
IIJIMA YOSHIO
Application Number:
JP2005213393A
Publication Date:
December 21, 2006
Filing Date:
June 09, 2005
Export Citation:
Assignee:
TOYO DENSHI KENKYUSHO KK
International Classes:
G01L21/32