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Title:
B-A TYPE IONIZATION VACUUM METER
Document Type and Number:
Japanese Patent JPS6249232
Kind Code:
A
Abstract:

PURPOSE: To enable the measurement of vacuum of a vacuum working chamber even during the bleeding of a gas from an ion collector, by arranging an introduction bar connected to a current introducing section outside the vacuum at both ends of the ion collector as projecting out of a glass wall.

CONSTITUTION: A first introducing bar 8 is provided at one end of an ion collector 6 while a second introducing bar 9 at the other end thereof both projecting out of a glass wall 3. Then, with the closing of a switch 11 for bleeding gas from the ion collector, the collector 6 is electrically energized with a battery 10 to heat it, which gasifies unstable molecules adsorbed on the collector 6, making them separate from the collector 6 to be discharged outside with a vacuum pump. Thus, the bleeding of the gas is performed by heating with the energization of the collector 6, in noway affecting optimum set potential difference for the measurement of vacuum of a filament 4 and a grid 5. This enables the measurement of vacuum of a vacuum working chamber 1 accurately during the bleeding of gas from the collector 6.


Inventors:
WATANABE WAKAO
Application Number:
JP18931185A
Publication Date:
March 03, 1987
Filing Date:
August 28, 1985
Export Citation:
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Assignee:
ANELVA CORP
International Classes:
G01L21/32; (IPC1-7): G01L21/32
Domestic Patent References:
JP40028507A
JPS495079A1974-01-17
Attorney, Agent or Firm:
Hachiman Yoshihiro