Title:
BAKING FURNACE
Document Type and Number:
Japanese Patent JP2008215728
Kind Code:
A
Abstract:
To provide a baking furnace capable of preventing devitrification of a member composed of transparent quartz glass.
This baking furnace 1 comprises an infrared ray lamp 5 for radiation-heating a baked object, a base 9 for loading the baked object, and an infrared ray transmitting member 7 disposed between the infrared ray lamp 5 and the base 9 to define a baking space S, and composed of the transparent quartz glass. The baking space S is connected with a gas supply passage 19 from a gas supply portion 17. When a gas is supplied into the baking space S from the gas supply passage 19, a gas flow F is formed along an inner peripheral face of the infrared ray transmitting member 7, that is, a surface of the base 9 side by the gas.
Inventors:
SAITO RYOJI
TAKAHASHI CHIAKI
NATSUI MASANAO
ISHII HIROKAZU
TAKAHASHI CHIAKI
NATSUI MASANAO
ISHII HIROKAZU
Application Number:
JP2007054633A
Publication Date:
September 18, 2008
Filing Date:
March 05, 2007
Export Citation:
Assignee:
TDK CORP
International Classes:
F27D7/02; F27B17/00; F27D9/00; F27D11/02
Domestic Patent References:
| JPH08264472A | 1996-10-11 | |||
| JP2005332849A | 2005-12-02 | |||
| JPH101323A | 1998-01-06 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki
Hiroaki Aoki
Shiro Terasaki
Hiroaki Aoki