Title:
バリヤ層の形成方法及びプラズマ成膜装置
Document Type and Number:
Japanese Patent JP4923933
Kind Code:
B2
Inventors:
Takashi Sakuma
Yokoyama Atsushi
Tatsuo Hatano
Mizusawa Nei
Yokoyama Atsushi
Tatsuo Hatano
Mizusawa Nei
Application Number:
JP2006276463A
Publication Date:
April 25, 2012
Filing Date:
October 10, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/285; C23C14/34; H01L21/28; H01L21/3205; H01L21/768; H01L23/52
Domestic Patent References:
| JP6061177A | ||||
| JP2005525694A |
Other References:
小林春洋,スパッタ薄膜-基礎と応用-,日刊工業新聞社,1993年 2月25日,初版,第32頁
Attorney, Agent or Firm:
Akihiro Asai