Title:
バリヤー層及びその製造方法
Document Type and Number:
Japanese Patent JP2010525161
Kind Code:
A
Abstract:
The invention relates to a method for manufacturing an article comprising a barrier layer, the method comprising
- providing an metallic or metalloid layer to a surface of a substrate by electro-deposition, using a plating liquid comprising an ionic liquid and metal ions or metalloid ions, which metal ions or metalloid ions are reduced and deposited to form the metallic or metalloid layer during the electro-eleposition; and
- preferably at least partially oxidising the metallic or metalloid layer.
Inventors:
Juan Mol, Antonius Maria Bernardas
Suho, Hermanus Francis Maria
Blessels, Petras Marinas Martinas Cornels
Van Erkel, Jost
Koese, Marinas Mark
Suho, Hermanus Francis Maria
Blessels, Petras Marinas Martinas Cornels
Van Erkel, Jost
Koese, Marinas Mark
Application Number:
JP2010504002A
Publication Date:
July 22, 2010
Filing Date:
April 17, 2008
Export Citation:
Assignee:
Netherlandse Organisatier Folde Toge Pastonatol Wettenchaperik Ondelso Ektienou
International Classes:
C25D3/66; B32B15/04; C25D5/00; C25D5/18; C25D5/48; C25D7/00; H01L51/50; H05B33/04; H05B33/10; C25D9/04
Domestic Patent References:
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Foreign References:
| WO2007093574A2 | 2007-08-23 | |||
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Attorney, Agent or Firm:
Mitsuo Matsui