Title:
BARRIER LAYER AND METHOD OF MANUFACTURING BARRIER LAYER
Document Type and Number:
Japanese Patent JP2012204342
Kind Code:
A
Abstract:
To provide a barrier layer with improved barrier properties.
Provided is a barrier layer 102 capable of preventing permeability of moisture, oxygen, other gases, solvents and volatile organic compounds. The barrier layer 102 includes a surface profile undulating in all directions and is free of non-undulating surfaces, straight lines and sharp edges. Further, the surface profile bends in reaction to at least one of thermal stress, mechanical stress and a load caused by deformation of an adjoining substrate or layer. This allows the barrier layer 102 to stretch and shrink in all directions in a plane along the surface profile of the barrier layer 102 and prevents cracking of the barrier layer.
Inventors:
JOOST MULLER
Application Number:
JP2012049287A
Publication Date:
October 22, 2012
Filing Date:
March 06, 2012
Export Citation:
Assignee:
MOSER BAER INDIA LTD
International Classes:
H05B33/04; B32B7/02; B32B9/00; H01L31/04; H01L51/50; H05B33/02
Attorney, Agent or Firm:
sk patent corporation
Akihiko Okuno
Hiroyuki Ito
Akihiko Okuno
Hiroyuki Ito
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