Title:
隔膜型圧力計
Document Type and Number:
Japanese Patent JP5798194
Kind Code:
B2
Abstract:
A pressure gauge includes a first sensor for detecting a pressure in a first range, a second sensor for detecting a pressure in a second range, and a processing unit for determining a pressure value based on outputs from the first sensor and the second sensor. The first and the second ranges have an overlapping range, an upper limit of the second range is higher than that of the first range, the processing unit determines a correction value based on outputs from the first sensor and the second sensor when a pressure falls within the overlapping range, and the processing unit determines a pressure value based on an output from the second sensor and the correction value, when measuring, by using the second sensor, a pressure in the second range, higher than that of the first pressure range.
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Inventors:
Miyashita jizo
Application Number:
JP2013537386A
Publication Date:
October 21, 2015
Filing Date:
September 12, 2012
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L21/00; G01L9/00; H01L29/84
Domestic Patent References:
| JP2007512535A | ||||
| JP60049438U | ||||
| JP2001255225A | ||||
| JP2003021566A | ||||
| JP2009053164A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu