Title:
BASE ISOLATING DEVICE AND EXPOSURE DEVICE SYSTEM
Document Type and Number:
Japanese Patent JP2011106635
Kind Code:
A
Abstract:
To provide a base isolating device capable of suppressing damage caused by vibration such as an earthquake, and an exposure device system.
The base isolating device includes a pedestal on which an object is placed, and movement suppressing parts provided to come in point-contact with a plurality of positions of the pedestal and suppressing the movement of the pedestal by a static frictional force and a dynamic frictional force generated between themselves and the pedestal by the point contact.
Inventors:
TAKAHASHI MASATO
YAMAMOTO KOJI
IWATSUKI EMI
UMEZAWA KAORI
YAMAMOTO KOJI
IWATSUKI EMI
UMEZAWA KAORI
Application Number:
JP2009264797A
Publication Date:
June 02, 2011
Filing Date:
November 20, 2009
Export Citation:
Assignee:
NIKON CORP
International Classes:
F16F15/02; F16F7/08; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Kazuya Nishi
Tadashi Takahashi
Kazuya Nishi