Title:
BASE PLATE DRYING DEVICE
Document Type and Number:
Japanese Patent JP3556043
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To maintain the purity of both surface of a base plate without causing an increase the cost by providing a drive part which rotates in a nearly horizontal plane a holding part and a ventilating means for passing clean gas though a space under the base plate.
SOLUTION: A holding part 2 has a mechanical-chuck type base plate rotating mechanism, in which a base plate holding mechanism 6 for releasably holding an edge of a base plate 1 is provided on a perpendicular part 5a of an end of an L-shaped holding arm 5, and a hub 4 is attached to a rotation cylinder 7 disposed along a vertical axis and the cylinder 7 is connected to a motor 9 of a drive part 3 through a transmission mechanism 8. And a shield plate mount part 10 is provided under the mechanism 6 to attach a funnel-shaped, tapered shield plate 11 to the part 5a, so that a disk-shaped space R is formed between the base plate and the plate 11. On the other hand, a fixed cylinder 12, in which a passage is formed to allow cleaning liquid and clean gas to flow countercurrently, is provided in the cylinder 7.
Inventors:
Mitsunao Shibasaki
Naoaki Kogure
Naoaki Kogure
Application Number:
JP9047796A
Publication Date:
August 18, 2004
Filing Date:
March 19, 1996
Export Citation:
Assignee:
Ebara Corporation
International Classes:
B08B3/02; F26B5/08; F26B11/04; F26B11/18; H01L21/00; H01L21/304; B08B3/00; (IPC1-7): F26B5/08; B08B3/00; B08B3/02; F26B11/18; H01L21/304
Domestic Patent References:
| JP58217184A | ||||
| JP63073626A | ||||
| JP7283126A | ||||
| JP4100231A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Susumu Ohata
Shintaro Hotta
Susumu Ohata