Title:
BATCH-TYPE HEAT TREATMENT DEVICE AND HEATER APPLIED FOR THE SAME
Document Type and Number:
Japanese Patent JP2014146815
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a batch-type heat treatment device which performs heat treatment of a plurality of substrates simultaneously in such a manner that temperatures in surfaces of the substrates become uniform.SOLUTION: The batch-type heat treatment device of the present invention includes: a chamber 100 which provides a heat-treatment space for a plurality of substrates 10; a boat 108 for loading the plurality of substrates 10 therein and supporting the substrates 10; and a plurality of main heater units 120 disposed at predetermined intervals in a direction in which the substrates 10 are stacked, each of the main heater units 120 comprising a plurality of individual main heaters 200, the substrates 10 are disposed between the plurality of main heater units 120.
Inventors:
HUR KWANSUN
KANG HO YONG
KANG HO YONG
Application Number:
JP2014043704A
Publication Date:
August 14, 2014
Filing Date:
March 06, 2014
Export Citation:
Assignee:
TERA SEMICON CORP
International Classes:
H01L21/324; F27D11/02
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Attorney, Agent or Firm:
Patent business corporation Oshima patent firm