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Title:
RING LIGHT ILLUMINATOR AND BEAM SHAPER FOR RING LIGHT ILLUMINATOR
Document Type and Number:
Japanese Patent JP2016105190
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a ring light illuminator capable of creating a well-defined and homogeneous illumination field in an area to be illuminated.SOLUTION: A ring light illuminator with annularly arranged light sources is disclosed. To each light source there corresponds a beam shaper 50 comprising a light collector 60, homogenizing means 70 for homogenizing light from the light source, and imaging means 80 for imaging an output of the homogenizing means 70 into an area to be illuminated. The homogenizing means 70 in various embodiments is a rod 70, into which light from the light collector 60 is directed. The end of the rod 70 opposite to the light collector 60 is imaged by the imaging means 80 into the area to be illuminated.SELECTED DRAWING: Figure 6

Inventors:
ANDY HILL
Application Number:
JP2016005081A
Publication Date:
June 09, 2016
Filing Date:
January 14, 2016
Export Citation:
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Assignee:
KLA-ENCOR CORP
International Classes:
G02B19/00; F21S2/00; G02B21/06; G02B21/10
Domestic Patent References:
JP2007033852A2007-02-08
Attorney, Agent or Firm:
Patent Corporation yki International Patent Office