Title:
ビーム調整方法及び三次元積層造形装置
Document Type and Number:
Japanese Patent JP7160857
Kind Code:
B2
Abstract:
A beam adjustment method includes: installing, on an irradiation surface to which an electron beam (L1) is radiated, a detection part (50) having a Faraday cup (51) catching electrical charges of the electron beam (L1), and installing, on a side of an electron gun (11) further than the detection part (50), a shielding plate (55) having opening holes (56) through which the electron beam (L1) is passable. The method includes causing, upon performing beam diameter measurement processing, the electron beam (L1) to pass through the opening holes (56), and radiating the electron beam (L1) to the Faraday cup (51). In addition, the method includes radiating, upon performing normal processing, the electron beam (L1) to the shielding plate (55).
Inventors:
Yuan Chihsiung
Takashi Sato
Takashi Sato
Application Number:
JP2020088419A
Publication Date:
October 25, 2022
Filing Date:
May 20, 2020
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
B22F3/105; B22F3/16; B22F10/28; B22F10/31; B22F12/41; B23K15/00; B29C64/153; B29C64/268; B29C64/393; B33Y10/00; B33Y50/02; G01T1/29; H01J37/06; H01J37/147; H01J37/244
Domestic Patent References:
| JP2005064041A |
Attorney, Agent or Firm:
Shinto International Patent Office
Previous Patent: Contact lens with element protection function
Next Patent: MOVING OBJECT DETECTING METHOD AND DEVICE
Next Patent: MOVING OBJECT DETECTING METHOD AND DEVICE