Title:
レーザ共振器のビーム軸ずれ検出装置およびビーム軸位置制御装置
Document Type and Number:
Japanese Patent JP4067167
Kind Code:
B2
Inventors:
Toru Nagai
Application Number:
JP8939898A
Publication Date:
March 26, 2008
Filing Date:
March 18, 1998
Export Citation:
Assignee:
Kawasaki Heavy Industries, Ltd.
International Classes:
H01S3/00; H01S3/086; H01S3/139
Domestic Patent References:
| JP60115273A | ||||
| JP5309487A | ||||
| JP3017658U | ||||
| JP2174283A | ||||
| JP62209881A | ||||
| JP62257780A |
Attorney, Agent or Firm:
Masaharu Seki