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Title:
BEAM FLUX CONVERSION ELEMENT, ILLUMINATION OPTICAL DEVICE, EXPOSURE DEVICE, AND EXPOSURE METHOD
Document Type and Number:
Japanese Patent JP2019032558
Kind Code:
A
Abstract:
To provide an illumination optical device capable of forming an annular illumination pupil distribution of a peripheral polarization state while satisfactorily suppressing a luminous energy loss.SOLUTION: The illumination optical device of the present invention includes a beam flux conversion element (50) for forming an annular light intensity distribution on a predetermined plane based on an incident beam flux. The beam flux conversion element comprises: a first basic element (50A) formed of an optical material having optical rotatory power, for forming a first circular arc area distribution out of the annular light intensity distribution based on the incident beam flux; a second basic element (50B) for forming a second circular arc area distribution; a third basic element (50C) for forming a third circular arc area distribution; and a fourth basic element (50D) for forming a fourth circular arc area distribution. The basic elements have different thicknesses from one another along the transmission direction of light.SELECTED DRAWING: Figure 11

Inventors:
TOYODA MITSUNORI
Application Number:
JP2018210862A
Publication Date:
February 28, 2019
Filing Date:
November 08, 2018
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G03F7/20; G02B5/18; G02B5/30; G02B19/00; G02B27/00; G02B27/28; G02B27/44; H01L21/027
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki