Title:
ビーム成形光学素子およびそれを備えたパターン描画装置
Document Type and Number:
Japanese Patent JP4214547
Kind Code:
B2
Inventors:
Yoshinori Kobayashi
Application Number:
JP2002250841A
Publication Date:
January 28, 2009
Filing Date:
August 29, 2002
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
G03F7/20; G02B27/18; H01L21/027
Domestic Patent References:
| JP11338162A | ||||
| JP11320968A | ||||
| JP2001305653A | ||||
| JP2004515818A | ||||
| JP2285355A | ||||
| JP2000284378A | ||||
| JP10078668A |
Attorney, Agent or Firm:
Takashi Matsuura
Hiroki Ogura
Tsuyoshi Nonaka
Shigeru Torayama
Tsubouchi Shin
Hiroki Ogura
Tsuyoshi Nonaka
Shigeru Torayama
Tsubouchi Shin