To perform machining with high machining quality concerning a beam irradiation method and apparatus for irradiating a workpiece with a laser beam.
(a) A pulsed laser beam, which is made incident by forming an irradiation region of a first shape, is emitted in a plurality of shots into a machining region, while the irradiation position is shifted so that the incident region is partly overlapped, and in a manner that the entire machining region is fully irradiated and that no irradiation region of the pulsed laser beam protrudes outside the machining region. (b) Within the machining region, in a short region in which the number of shots of the pulsed laser beam is short in the process (a), there is emitted a pulsed laser beam which is made incident by forming an irradiation region of a second shape corresponding to the shape of the short region.
| JP2004188483A | 2004-07-08 | |||
| JPH11104876A | 1999-04-20 | |||
| JP2002283084A | 2002-10-02 | |||
| JP2001150158A | 2001-06-05 |
Mikio Kuruyama
Ukai Shinichi