To provide a bearing structure of a vacuum pump in which a rotor can be favorably supported by an emergency bearing, and a vacuum pump using it.
A turbo molecular pump (a vacuum pump) consists of a rotor, a housing 3 for accommodating the rotor, a magnetic bearing for supporting the rotor so as to be rotatable to the housing 3, an emergency bearing 5 which is supported in the housing 3 and which rotatably supports the rotor with respect to the housing 3 during a functional stop of the magnetic bearing and a drive unit such as an electric motor for rotatively driving the rotor around an axial line. A recess 3c for accommodating the outer ring 12 of the emergency bearing 5 is provided to the inner peripheral surface 3b of a portion receiving the emergency bearing 5 in the housing 3. A heat resistant heat insulating material 16 is provided between the inner surface of the recess 3c and the outer peripheral surface of the outer ring 12, and composed of a SUS made sheet arranged in a space between the lower surface of the outer ring 12 and the inner surface of the recess 3c.
OKAMURA TOMOAKI
YOSHIKAWA MASASHI
| JPH11188505A | 1999-07-13 | |||
| JP2000136791A | 2000-05-16 | |||
| JP2000346068A | 2000-12-12 | |||
| JP2001032789A | 2001-02-06 |
Kunio Ueda
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