Title:
載置台、処理装置および処理システム
Document Type and Number:
Japanese Patent JP4850811
Kind Code:
B2
Abstract:
The invention provides a loading station, a processing device and a processing system. The loading station can simultaneously conjoin a plurality of processed matters and process a plurality of processed matters, wherein a plurality of board type movable sealing members (123) are freely up-down and mutually separately arranged in the same direction on a connection mechanism (111) on a base (105).The movable sealing members (123) are not interfered with forks (23) of a conveying device (25) and are raised to a higher position than the forks (23). On the way, a flake substrate (S) loaded on the forks is simultaneously conjoined to the movable sealing members (123).
Inventors:
Toyo Toyo
Kazuo Sasaki
Kazuo Sasaki
Application Number:
JP2007288083A
Publication Date:
January 11, 2012
Filing Date:
November 06, 2007
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/683; H01L21/205; H01L21/3065; H01L21/31; H01L21/677
Domestic Patent References:
| JP2006294786A | ||||
| JP2007095695A | ||||
| JP2006066417A | ||||
| JP2004241702A | ||||
| JP9320948A | ||||
| JP8046020A |
Attorney, Agent or Firm:
Kazuhiro Watanabe
Katsumi Hoshimiya
Katsumi Hoshimiya