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Title:
BENDING VIBRATION PIECE, VIBRATOR, OSCILLATOR, AND ELECTRONIC APPARATUS
Document Type and Number:
Japanese Patent JP2012023526
Kind Code:
A
Abstract:

To provide a bending vibration piece which suppresses the loss of vibration displacement energy for vibrating vibration arms and maintains stable vibration characteristics.

A crystal vibration piece 1 serving as a bending vibration piece includes a base 2, vibration arms 3 formed so as to extend from the base 2, and a laminate structure 9. The laminate structure 9 includes an excitation electrode 12 serving as a first electrode, an excitation electrode 22 serving as a second electrode, and a piezoelectric layer 6 disposed between the excitation electrode 12 and the excitation electrode 22. The laminate structure 9 is formed at least in the vibration arm 3, and the piezoelectric layer 6 has a slope 4 at an end part positioned on the base 2 side.


Inventors:
ARAI TOMOHIRO
Application Number:
JP2010159510A
Publication Date:
February 02, 2012
Filing Date:
July 14, 2010
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H03H9/19; H01L41/09; H01L41/18; H01L41/187; H01L41/22; H01L41/311; H01L41/332; H03B5/32; H03H9/215; H03H9/24
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka