Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
BIAXIAL GONIO-STAGE
Document Type and Number:
Japanese Patent JPH03270817
Kind Code:
A
Abstract:

PURPOSE: To have a low-height type biaxial gonio-stage by turning in an arcuate form the Y-axis gonio-stage of the biaxial gonio-stage by means of a guiding means provided on the X-axis gonio-stage, thereby inclining the Y-axis stage at an arbitral angle.

CONSTITUTION: In this biaxial gonio-stage a Y-axis gonio-stage 12 is turned in an arcuate form by means of guiding means 11d provided on a side parallel to the Y-axis direction of X stage 11a of an X-axis gonio-stage 11, and the Y stage 12a of the Y-axis gonio-stage 12 is adapted to be inclined in the Y axis direction at an arbitral angle. Namely, the Y axis gonio-stage 12 is installed on the X axis gonio-stage 11 so that the X axis gonio-stage 11 and the Y axis gonio-stage 12 are mutually position in the height direction. As a result, a biaxial gonio stage of low height type can be provided.


Inventors:
MAKABE TAKESHI
HIGUCHI YOICHI
Application Number:
JP7065790A
Publication Date:
December 03, 1991
Filing Date:
March 20, 1990
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
FUJITSU AUTOMATION
International Classes:
A61B6/04; A61N5/10; G03F7/20; H01L21/027; H01L21/30; G21K1/06; (IPC1-7): A61B6/04; A61N5/10; B23G1/14; G21K1/06; H01L21/027
Attorney, Agent or Firm:
Teiichi