PURPOSE: To reduce the size of a drive source by disposing a stator of a linear motor for moving a stage in an X direction to a rear side of a board, and mounting its moving element in the motor of a front side of the board for moving the stage in a Y direction.

CONSTITUTION: A pair of guides 2a, 2b of an X-axis direction and a sliders 3a, 3b are provided on a front side of a board 1. A yoke 43 and a coil 44-n (n=1-n) for forming a stator of an X-axis linear motor 4 are provided on a lower surface of the board. A moving element 44 is mounted in a Y-axis linear motor 5 on an upper surface of the board by aligning permanent magnets 46-m alternately magnetized in opposite polarities in a thickness direction in an X-axis direction. A stator 51 of the motor 5 has a Y-axis base 54 and a yoke 54 on the sliders 3a, 3b, Y-axis driving permanent magnets 55-n alternately magnetized in opposite polarities in a thickness direction are arranged in a Y-axis direction, and a yoke 52 is moved in the Y-axis direction. Thus, the moving element of the motor 4 is disposed directly under a center of gravity of the motor 5 to prevent axial deviation and to reduce of the size of a driving system.