To solve a problem of a reduction in precision of analysis due to a reduction in degree of vacuum by outgas generated by a drive motor installed within a vacuum vessel, lubricant oil, a resin-made belt, etc., a problem of deterioration in precision of positioning due to backlash between a pinion and a rack, and a problem of a reduction in resolution of table movement by the use of a pinion and a belt.
By using a spline bearing 14 capable of moving in a Y-axis direction, it is possible to install an X motor 7 together with a Y motor 2 outside a vacuum vessel 30. By using a noncontact type magnetic coupling 24 without backlash as a transmission mechanism of torque and rotational motion between two axes orthogonal to each other in place of a rack&pinion, the precision of positioning is improved. Further, by using an X feed screw 10 in place of a rack&pinion and a belt, resolution is improved.
| JP2011002389A | 2011-01-06 | |||
| JPH09280341A | 1997-10-28 |
Ryo Kaimoto
Hiroyuki Eguchi