PURPOSE: To facilitate cleaning and disposal of a part in which a suction/ delivery valve is incorporated by dividing a device into a valve unit, which is provided with a suction port having a suction valve and a delivery port having a delivery valve, and a drive unit in which a piezoelectric element is incorporated, and enabling them to be assembled detachably.

CONSTITUTION: A bimorph pump 1 consists of a valve unit 2 and a drive unit 3, and an unit body 4 of the valve unit 2 is provided with a suction port 6 attached with a suction valve 5 and a delivery port 8 attached with a delivery valve 7. Again, an unit body 11 of the drive unit 3 is attached with a bimorph type of piezoelectric element 12 for driving a pump. The unit body 4 of the valve unit 2 and the unit body 11 of the drive unit 3 are detachably connected together through threaded engagement for forming a pump body 13. Next, the valve unit 2 is taken off from the drive unit 3 and only the drive unit 3 side is washed and disinfected. The valve unit 2 side can be taken off in such way, therefore a pump chamber 22 of portion is widely opened and can be washed and disinfected easily and still more certainly.