Title:
BIPOLAR-TRANSISTOR ECL DEVICE AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3522462
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To enhance the specific accuracy of a load resistance as an ECL circuit with the same contact resistance by a method wherein contacts on the power-supply side of two resistance elements which are composed of a polycrystalline silicon film are reduced to one.
SOLUTION: Resistance element 106 which are composed of a polycrystalline silicon film are connected to a Vcc power-supply interconnection 111 by means of one resistance contact 109. In addition, a polycrystalline silicon film protrusion part 110 is formed in such a way that its transverse direction becomes a contact face as a whole. In this manner, when contact on the power-supply side of the resistance elements 106 are reduced to one, a bipolar-transistor ECL device can have an identical contact resistance, the specific accuracy of a load resistance as an ECL circuit can be enhanced, and the consistence of a signal can be improved. In addition, the transverse direction of the polycrystalline silicon film protrusion part 110 becomes a contact face up to edge sides, the distance difference between the contact and a resistance is not generated, and the specific accuracy of the resistance in the ECL circuit can be enhanced.
Inventors:
Hidaka, Hajime
Application Number:
JP25628396A
Publication Date:
April 26, 2004
Filing Date:
September 27, 1996
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
H01L27/082; H01L21/8222; H03K19/086; (IPC1-7): H01L21/8222; H01L27/082; H03K19/086
Attorney, Agent or Firm:
清水 守 （外１名）
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