BIS(P-T-BUTOXYPHENYL) SULFOXIDE - SHINETSU CHEMICAL CO

Title:

BIS(P-T-BUTOXYPHENYL) SULFOXIDE

Document Type and Number:

Japanese Patent JPH07215930

Kind Code:

A

Abstract:

PURPOSE: To obtain a new bis(p-t-butoxyphenyl) sulfoxide usable e.g. as a synthetic intermediate for a sulfonium useful as an acid generator of a chemical amplification positive-type resist material.

CONSTITUTION: This bis(p-t-butoxyphenyl) sulfoxide is expressed by formula 1. The bis(p-t-butoxyphenyl) sulfoxide of formula 1 can be produced by reacting a p-t-butoxyphenyl Grignard reagent of formula 2 (X is Cl or Br) with thionyl chloride. A sulfonium salt having at least two p-t-butoxyphenyl groups can be synthesized by using the compound of formula 1 as an intermediate. The sulfonium salt has high light sensitivity as an acid generator which is a component of a chemical amplification positive-type resist in a lithography using high energy rays such as far ultraviolet rays, excimer laser, electron rays and X rays.

More Like This:

JPS5826864	HERBICIDAL COMPOUND DERIVED FROM PHENOXYBENZOIC ACID, MANUFACTURE AND USE
JP4393376	Phenylcyclohexylpropanolamine derivatives, their production methods, and their therapeutic applications
JPS5822095	[Title of the Invention] A process of Acryloyl or a meta-Acryloyl derivative

Inventors:

OSAWA YOICHI
SHIMADA JUNJI
WATANABE SATOSHI
TAKEDA YOSHIFUMI

Application Number:

JP2617194A

Publication Date:

August 15, 1995

Filing Date:

January 28, 1994

Export Citation:

Click for automatic bibliography generation Help

Assignee:

SHINETSU CHEMICAL CO

International Classes:

C07C317/22; (IPC1-7): C07C317/22

Attorney, Agent or Firm:

Takashi Kojima

Previous Patent: Installation method of sloping gate and sloping gate

Next Patent: PRODUCTION OF OMEGA-ALKYLTHIOALKYL ISOTHIOCYANATE