Title:
BLADE TENSION JUDGING METHOD
Document Type and Number:
Japanese Patent JPH01210271
Kind Code:
A
Abstract:
PURPOSE: To detect tension of a blade efficiently in short time by arranging an eddy current detector closely to the blade face.
CONSTITUTION: An eddy current detector 6 is arranged closely to the blade face 1 in a slicing machine for cutting wafers from an ingot. When the blade 1 is rotating, a signal detected through the eddy current detector is compared with a known eddy current signal prevailing when the blade 1 is stretched normally, thus detecting the tension of the blade 1 contactlessly and monitoring the cut state of the work as required. A tension regulating mechanism 5 regulates the tension of the blade 1 to a normal level based on the detected result.
Inventors:
HONDA KATSUO
SAWAFUJI SUSUMU
SAWAFUJI SUSUMU
Application Number:
JP3208588A
Publication Date:
August 23, 1989
Filing Date:
February 15, 1988
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B23D47/00; B23D59/00; B24D5/12; B24D5/16; B28D5/00; B28D5/02; H01L21/304; (IPC1-7): B24D5/12; B24D5/16; B28D1/22; H01L21/304
Domestic Patent References:
| JPS6186214A | 1986-05-01 | |||
| JPS60110408A | 1985-06-15 | |||
| JPS63306005A | 1988-12-14 |
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