Title:
BLOCK POLYMER COMPOSITION
Document Type and Number:
Japanese Patent JPS62277417
Kind Code:
A
Abstract:
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis.
Inventors:
JIEEMUZU BINSENTO KURIBERU
Application Number:
JP9639587A
Publication Date:
December 02, 1987
Filing Date:
April 21, 1987
Export Citation:
Assignee:
GEN ELECTRIC
International Classes:
C08G85/00; C08K5/00; C08L53/00; C08F293/00; C08L83/10; G03F7/075; (IPC1-7): C08F293/00; C08L53/00
Attorney, Agent or Firm:
Tokunji Ikunuma