Title:
基板固定構造および物理量センサ
Document Type and Number:
Japanese Patent JP5669076
Kind Code:
B2
Inventors:
南 那由多
Application Number:
JP2009075145A
Publication Date:
February 12, 2015
Filing Date:
March 25, 2009
Export Citation:
Assignee:
パナソニックＩＰマネジメント株式会社
International Classes:
G01P15/08; G01P1/02; H01L29/84; H01R13/66
Attorney, Agent or Firm:
Yasuo Itaya
Katsumi Taguchi
Shinichi Mizuta
Masayuki Itaya
Katsumi Taguchi
Shinichi Mizuta
Masayuki Itaya