Title:
基板ホルダ
Document Type and Number:
Japanese Patent JP6971922
Kind Code:
B2
Abstract:
One object of this application is to provide an advanced substrate holder including a clamper. A substrate holder for holding a substrate by interposing the substrate between frames is disclosed. The substrate holder includes a front frame, a rear frame, and one or a plurality of clampers. Each of the clampers includes a hook portion including a hook base and a hook main body, and a plate including at least one claw. At least one of the clampers includes the plate including a first claw for a lock and a second claw for a semi-lock.
Inventors:
Matsutaro Miyamoto
Application Number:
JP2018122083A
Publication Date:
November 24, 2021
Filing Date:
June 27, 2018
Export Citation:
Assignee:
Ebara Corporation
International Classes:
C25D17/06; C25D7/12; C25D17/08
Domestic Patent References:
| JP2012107311A | ||||
| JP2008045179A | ||||
| JP2018040045A |
Attorney, Agent or Firm:
Toru Miyamae
Shinjiro Ono
Yukio Kanegae
Makoto Watanabe
Nara Earth
Shinjiro Ono
Yukio Kanegae
Makoto Watanabe
Nara Earth