Title:
基板保持ケース及び基板搬送システム
Document Type and Number:
Japanese Patent JP4335608
Kind Code:
B2
Inventors:
Osamu Hanaoka
Application Number:
JP2003293272A
Publication Date:
September 30, 2009
Filing Date:
August 14, 2003
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
H01L21/673; B65D25/24; B65D77/04; B65D85/86; G03F1/66; H01L21/027; H01L21/677; H01L21/68
Domestic Patent References:
| JP11059777A | ||||
| JP8058971A | ||||
| JP10139159A | ||||
| JP2060248U | ||||
| JP7302833A |
Attorney, Agent or Firm:
Kihei Watanabe