Title:
基板保持装置
Document Type and Number:
Japanese Patent JP4153582
Kind Code:
B2
Inventors:
Otaguro Hiroshi
Application Number:
JP6535398A
Publication Date:
September 24, 2008
Filing Date:
March 16, 1998
Export Citation:
Assignee:
Toshiba Matsushita Display Technology Co., Ltd.
International Classes:
B23Q3/08; F16B47/00; G02F1/13; G02F1/1333; G02F1/1339
Domestic Patent References:
| JP9281513A | ||||
| JP5119325A | ||||
| JP10268325A | ||||
| JP2291522A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto