Title:
基板検査装置、基板処理装置および基板検査方法
Document Type and Number:
Japanese Patent JP7089906
Kind Code:
B2
Abstract:
A sample image data obtaining unit obtains sample image data displaying a sample image. An inspection image data obtaining unit obtains inspection image data displaying an inspection image. A correction unit calculates the relative deviation amount of a sample unit image and an inspection unit image corresponding to each other based on an average gradation value with respect to each pixel group and corrects a corresponding relation of the sample image data and the inspection image data based on a plurality of calculated deviation amounts. A determination unit determines the presence or absence of defects of an exterior with respect to an inspection substrate based on the corresponding relation after correction.
Inventors:
Tomohiro Matsuo
Koji Nakagawa
Koji Nakagawa
Application Number:
JP2018040876A
Publication Date:
June 23, 2022
Filing Date:
March 07, 2018
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
G01N21/956; G01B11/00; G03F7/20; G06T1/00
Domestic Patent References:
| JP2016219746A | ||||
| JP2007299248A | ||||
| JP3225481A | ||||
| JP4074906A |
Foreign References:
| US20180144961 |
Attorney, Agent or Firm:
Fukushima Shoto
Masahiro Nakagawa
Hideyuki Sawamura
Masahiro Nakagawa
Hideyuki Sawamura