Title:
基板浮上装置
Document Type and Number:
Japanese Patent JP5160996
Kind Code:
B2
Inventors:
Tomokazu Kiuchi
Application Number:
JP2008202433A
Publication Date:
March 13, 2013
Filing Date:
August 05, 2008
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
H01L21/683; B65G7/06
Domestic Patent References:
| JP2006182563A | ||||
| JP10028855A | ||||
| JP2003118135A | ||||
| JP2006212486A | ||||
| JP2004338849A | ||||
| JP2004345744A | ||||
| JP60015319A |
Attorney, Agent or Firm:
Yoshiyuki Osuga