Title:
【発明の名称】板体加熱装置
Document Type and Number:
Japanese Patent JP2966397
Kind Code:
B1
Inventors:
WATANABE FUMIO
HAGA SHIGETAKA
HAGA SHIGETAKA
Application Number:
JP16966598A
Publication Date:
October 25, 1999
Filing Date:
June 17, 1998
Export Citation:
Assignee:
SUKEGAWA DENKI KOGYO KK
International Classes:
H05B3/06; H01L21/324; H01L21/68; H01L21/683; (IPC1-7): H01L21/324; H01L21/68; H05B3/06
Domestic Patent References:
| JP773957A | ||||
| JP456764A |
Attorney, Agent or Firm:
Kazuyoshi Hojo