Title:
基板処理装置
Document Type and Number:
Japanese Patent JP3582952
Kind Code:
B2
Inventors:
Tsutomu Ueyama
Application Number:
JP2482997A
Publication Date:
October 27, 2004
Filing Date:
February 07, 1997
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP8323303A |
Attorney, Agent or Firm:
Tsutomu Sugiya