Title:
基板処理装置
Document Type and Number:
Japanese Patent JP5362623
Kind Code:
B2
Inventors:
Yukio Tomifuji
Junichi Yamakoshi
Horikoshi Akira
Junichi Yamakoshi
Horikoshi Akira
Application Number:
JP2010046222A
Publication Date:
December 11, 2013
Filing Date:
March 03, 2010
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/306; H01L21/027; H01L21/304
Domestic Patent References:
| JP1174247A | ||||
| JP200552825A |
Attorney, Agent or Firm:
Takashi Otsubo
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