Title:
BOARD PROCESSING UNIT
Document Type and Number:
Japanese Patent JP2004225878
Kind Code:
A
Abstract:
To provide a board processing unit having a gate valve with a large bore diameter and a simple structure without generating particles.
In the board processing unit having the gate valve 25 that blocks up an opening 37a airtightly, the above gate valve has a valve unit 76 that can move to the opening face. The valve unit has a back up plate 78, a valve body 79 that can approach or separate from the back up plate, a bellows 89 that is equipped airtightly between the valve body and the above back up plate and a back pressure room 80 that is formed in the bellows, and it makes that the pressurized fluid can be supplied in the back pressure room.
Inventors:
TATSUTA MASAHIRO
NOTO KOICHI
AKUTSU NORIO
NOTO KOICHI
AKUTSU NORIO
Application Number:
JP2003017981A
Publication Date:
August 12, 2004
Filing Date:
January 27, 2003
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC
International Classes:
F16K3/18; F16K31/122; F16K51/02; (IPC1-7): F16K3/18; F16K31/122; F16K51/02
Attorney, Agent or Firm:
Shoji Miyoshi
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