To provide a substrate storing container equipped with a valve for a gas purge capable of maintaining the effects of purge in a long time, and attaching/detaching it in a simple structure, and efficiently carrying out gas purge in a relatively short time.
A valve body 20 attachable to a through-hole 4 of a substrate storing container 1 is configured of a fixed cylinder 21 to be fit from one side of the through-hole 4, a holding cylinder 25 to be fit from the other part of the through-hole 4 and to be combined with a fixed cylinder 21, a check valve 31 incorporated in the fixed cylinder 21 and the holding cylinder 25 with a clearance interposed, and an elastic supporting member 33 for movably supporting the check valve 31. Also, a first engagement part 39 is formed on the internal face of an inner lid cylinder 34, a second engagement part 40 to be engaged with the first engagement part 39 is formed in the check valve 31, and an gas channel is formed outside the check valve 31. In this case, the engagement part for preventing the position deviation of the check valve when it is made movable is formed so that, even when it is repeatedly used, gas displacement can be stably carried out. Also, the gas channel is formed outside the check valve so that gas displacement can be efficiently carried out.
COPYRIGHT: (C)2004,JPO
Junya Toda
Takayuki Nakayama
| JP2000315724A | ||||
| JP6006843U |