Title:
基板搬送装置、基板搬送方法および撮像装置
Document Type and Number:
Japanese Patent JP5426416
Kind Code:
B2
Inventors:
Naoshi Fukao
Yutaka Kobori
Yutaka Kobori
Application Number:
JP2010021571A
Publication Date:
February 26, 2014
Filing Date:
February 02, 2010
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B65G25/06; H05K3/00
Domestic Patent References:
| JP2006098726A | ||||
| JP1281190A | ||||
| JP50045861U |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita