Title:
基板搬送装置および基板搬送方法
Document Type and Number:
Japanese Patent JP6650836
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To understand a sign of failure in batch transportation of substrates.SOLUTION: A substrate transport device includes a first transport device, a second transport device, a detector, a control section, and a storage section. The first transport device has a first holding section capable of holding multiple substrates in multistage, and performs batch transportation of the multiple substrates to a delivery section. The second transport device has a second holding section for taking out the substrates, placed in the delivery section by the first transport device, one by one and holding them. The detector detects the holding position of the substrate held in the second holding section. The control section calculates deviation amount of the substrate, on the basis of the detection results of the detector. The storage section stores the deviation amount of each stage of the first holding section in time series. The control section estimates a failure of the first transport device, on the basis of the change of the deviation amount stored in the storage section.SELECTED DRAWING: Figure 8
Inventors:
Katsuhiro Morikawa
Tokutaro Hayashi
Tokutaro Hayashi
Application Number:
JP2016117464A
Publication Date:
February 19, 2020
Filing Date:
June 13, 2016
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; B25J15/00; B65G49/07
Domestic Patent References:
| JP2013162029A | ||||
| JP10340940A | ||||
| JP2009194184A |
Attorney, Agent or Firm:
Sakai International Patent Office