Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP6396797
Kind Code:
B2
Abstract:
A sealed actuator including stacked motor modules. Each motor module has a motor module housing, a motor stator attached to a respective motor module housing, a motor rotor in communication with a respective motor stator, and a stator seal disposed between the motor stator and motor rotor, surrounding the motor rotor and having a sealing surface interface, that interfaces with a respective sealing housing surface of the motor module housing, facing the motor rotor to seal the motor stator from the motor rotor. The motor module housings are stacked against each other and the sealing housing surface interfaced, at the sealing surface interface facing the rotors, to the respective stacked stator seals of the motor module housings forms a substantially continuous seal interface of the stacked motor modules sealed by the stacked stator seals to form a continuous barrier seal between the motor rotors and the motor stators.
Inventors:
Cabbenny robert tee
Application Number:
JP2014520351A
Publication Date:
September 26, 2018
Filing Date:
July 13, 2012
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
B25J17/00; B25J9/06; H01L21/677
Domestic Patent References:
| JP60073380U | ||||
| JP2003180067A | ||||
| JP2001332599A | ||||
| JP2010532154A | ||||
| JP2004535072A | ||||
| JP2001009770A |
Foreign References:
| WO2006006554A1 |
Attorney, Agent or Firm:
Asahina Patent Office
Kawamura Taku
Yousuke Fujimori
Shinya Okude
Kawamura Taku
Yousuke Fujimori
Shinya Okude