Title:
基板搬送設備
Document Type and Number:
Japanese Patent JP5168594
Kind Code:
B2
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Inventors:
Tatsuo Nakao
Kiyoshi Exit
Kiyoshi Exit
Application Number:
JP2009267763A
Publication Date:
March 21, 2013
Filing Date:
November 25, 2009
Export Citation:
Assignee:
Daifuku Co., Ltd.
International Classes:
B65G1/00; B65G49/06; H01L21/677
Domestic Patent References:
| JP2008094494A | ||||
| JP2002353299A | ||||
| JP11168136A | ||||
| JP2002093877A |
Attorney, Agent or Firm:
Shuichiro Kitamura
Kunihiko Higashi
Kimura Masato
Kunihiko Higashi
Kimura Masato