Title:
BOAT FOR LONGITUDINAL TYPE DIFFUSION FURNACE
Document Type and Number:
Japanese Patent JPH09153463
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a lifetime-prolonged boat for vertical diffusion ovens. SOLUTION: A boat comprises a top plate 71, bottom plate, pair of first bars 73 which couple the top and bottom plates and have many slots to house wafers, pair of second bars 74 which are disposed at specified angle to a center line C2 perpendicular to a center line C1 at one side of the top and bottom plates, couple both plates, have many slots corresponding to those of the bars 73, and pair of first auxiliary bars 75 which are disposed adjacent to the bars 73 and couple the top and bottom plates. The boat may have a pair of second auxiliary bars 76 which are disposed adjacent to the bars 74 and couple the top and bottom plates and at least one pair of support bars 77 which couple the bars 75 and 76. Thereby the thermal deformation of the bars 73 can be greatly reduced to prevent the wafer from dropping from the slot and prolong the life of the boat.
Inventors:
YANA SHIYOUBUN
KEN SHIYOUKAN
KIN SOUUN
BOKU CHIYUUBAI
KEN SHIYOUKAN
KIN SOUUN
BOKU CHIYUUBAI
Application Number:
JP23819896A
Publication Date:
June 10, 1997
Filing Date:
September 09, 1996
Export Citation:
Assignee:
SAMSUNG ELECTRONIC
International Classes:
H01L21/683; F27D5/00; H01L21/22; (IPC1-7): H01L21/22; H01L21/68
Attorney, Agent or Firm:
Hattori Masaki
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