Title:
【発明の名称】圧電アクチュエータ、インクジェットヘッド及びインクジェット式記録装置
Document Type and Number:
Japanese Patent JP3202012
Kind Code:
B1
Abstract:
PROBLEM TO BE SOLVED: To provide a piezoelectric actuator comprising a thin piezoelectric film of high voltage-resistance, an ink-jet head comprising it, and an ink-jet type recording device. SOLUTION: As an actuator of an ink-jet head 1, a piezoelectric actuator 16 is used which has a perovskite type structure comprising Pb, Zr, and Ti and is provided with a piezoelectric film of 1-10 μm in thickness. Related to the piezoelectric film 18, its permittivity is 150-500, a plane where an X-ray diffraction peak is maximum is a (001) plane, a dielectric los is 5% or less, Pb/(tr+Ti)=1.1-1.5, and a plurality of piezoelectric thin films 18a and 18b having different composition ratio are stacked.
Inventors:
Shintaro Hara
Jinno Isaku
Takanori Nakano
Jinno Isaku
Takanori Nakano
Application Number:
JP2000091530A
Publication Date:
August 27, 2001
Filing Date:
March 29, 2000
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B41J2/045; B41J2/055; H01L41/09; H01L41/18; H02N2/00; (IPC1-7): H01L41/09; B41J2/045; B41J2/055; H01L41/18; H02N2/00
Domestic Patent References:
| JP45874A | ||||
| JP6350154A | ||||
| JP10235864A | ||||
| JP62241870A | ||||
| JP62241823A | ||||
| JP62162623A | ||||
| JP4727396A | ||||
| JP11238921A | ||||
| JP200052559A | ||||
| JP10286953A | ||||
| JP8116103A |
Other References:
【文献】「セラミック誘電体工学(第4版)」、岡崎清著、学献社、1992年発行(第334~335頁)
Attorney, Agent or Firm:
Hiroshi Maeda (1 person outside)